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Speciality Gases
What we offer
UHP Tech has unmatched capability to provide advance engineering solutions to provide Automatic, continuous and safe flow of Ultra High Purity Inert, Corrosive, Oxidising, Reactive, Toxic(ICORT) & Flammable gases handling system.We offer Concept to commissioning design with Supply, Installation, Testing and Commissioning services.
List of Equipments
- Gas Cabinets
- Rack Panels
- Gas Valve Manifold Box / Panels
- Gas Manifolds
- Gas Supply Panels
- Gas Purification System
- Abatement System
List of Speciality Gases Handled:
- SiH4 – Silane
- PH3 – Phosphine
- BCL3 – Boron Trichloride
- CL2- Chlorine
- N2O- Nitrous Oxide
- NH3- Ammonia
- TMA- Tri Methyl Aluminium
- AsH3 - Arsine
- HCl- Hydrochloric acid
- H2- Hydrogen
- SiH2Cl2- Di chlorosilane
- TMB- Tri Methyl Boron
- SF6- Hexafluoride Sulphur
- C2H4- Ethylene
- C4F8- Octafluorocyclobutane
- CH4 - Methane
- CF4- Tetrafluoromethane
- CHF3- Trifluoro methane
- B2H6- Diborane
- H2S- Hydrogen Sulfide
MOC used for Speciality Gases
- SS316L Coaxial Tubes
- SS316L Electropolished Tubes
Total Length Installed
Coaxial Tubing
Total Length Installed Electropolished Tubing
Services
Testing & Validation
a. Pressure Hold Test – 1.5 times of working Pressure b. Helium Leak Test - 10-9 mbar lt/sec c. Oxygen Test- Up to PPB/PPM d. Moisture Test- Up to PPB/PPM e. Particle Count Test- Up to PPB/PPM