Semiconductor

Case Studies :

1. SCL, Mohali 

UHP technologies is a long-term partner with SCL, Mohali since 2011. Until present, UHP has established the cleanroom of class 100 and class 1000 for semiconductor equipment. Provided gas purification solutions. Has completed the installation of 8” wafer process tools (64 nos.)

The brief scope of work of UHP:

  1. Cleanroom
  2. HVAC
  3. Utility distribution including 
       a. Gas distribution ( Ammonia, Silane, Phosphene, Arsine, Dichloro Silane, Diborane, Hexafluoroethane, TEOS, Sulfur hexafluoride, Halocarbons Hydrogen, Argon, Compressed Dry Air (CDA), Nitrogen, Oxygen)
  4.    b. Acid Drain

       c. Electrical

       d. Exhaust system and Abatement system

       e. Process cooling water

  5. Electrical 
  6. Facility Control and Monitoring (FCMS)
  7. Life safety system
  8. Process tool hook up and commissioning 

The tool hook-ups done by UHP are:

Diffusion LithographyEtching – Wet
Etching – DryImplantationION implantation
LPCVDAtmospheric FurnacesBonder
MetrologyCVD

2. SITAR, Bangalore

UHP Technologies has been associated with SITAR since 2014. UHP has been the Indigenous solution provider for utilities for which SITAR were majorly dependent on foreign parties:

Scope of activities done by UHP:

  1. Gas distribution system hazardous gases (Silane, Diborane, Phosphine, Nitrogen )
  2. LPCVD Equipment/Tool refurbishment
  3. UHP is currently establishing cleanrooms at SITAR for 
    • System-Level Testing (SLT) testing lab
    • Thick film lab 



3. GAETEC, Hyderabad

Scope of activities in UHP scope

  1. The gas distribution system for hazardous gases (Carbon tetrafluoride, Hydrogen, Helium, Oxygen, Argon, Boron Trichloride, Chlorine, Silane, Ammonia, Nitrogen)

Major Customers

Sl.No.Project Name
1Semi-conductor Laboratory-Chandigarh
2Air Liquide Singapore Private Limited- Singapore
3Bharat Electronics Limited-Bengaluru
4Gallium Arsenide Enabling Technology Centre-Hyderabad
5Oxford Instruments-Kolkata
6Applied Materials India Private Limited-Mumbai
7SAMCO- Egypt
8NVIDIA Graphics Pvt Ltd-Bengaluru