Semiconductor
Case Studies :
1. SCL, Mohali
UHP technologies is a long-term partner with SCL, Mohali since 2011. Until present, UHP has established the cleanroom of class 100 and class 1000 for semiconductor equipment. Provided gas purification solutions. Has completed the installation of 8” wafer process tools (64 nos.)
The brief scope of work of UHP:
- Cleanroom
- HVAC
- Utility distribution including
a. Gas distribution ( Ammonia, Silane, Phosphene, Arsine, Dichloro Silane, Diborane, Hexafluoroethane, TEOS, Sulfur hexafluoride, Halocarbons Hydrogen, Argon, Compressed Dry Air (CDA), Nitrogen, Oxygen) - Electrical
- Facility Control and Monitoring (FCMS)
- Life safety system
- Process tool hook up and commissioning
b. Acid Drain
c. Electrical
d. Exhaust system and Abatement system
e. Process cooling water
The tool hook-ups done by UHP are:
Diffusion | Lithography | Etching – Wet |
Etching – Dry | Implantation | ION implantation |
LPCVD | Atmospheric Furnaces | Bonder |
Metrology | CVD |
2. SITAR, Bangalore
UHP Technologies has been associated with SITAR since 2014. UHP has been the Indigenous solution provider for utilities for which SITAR were majorly dependent on foreign parties:
Scope of activities done by UHP:
- Gas distribution system hazardous gases (Silane, Diborane, Phosphine, Nitrogen )
- LPCVD Equipment/Tool refurbishment
- UHP is currently establishing cleanrooms at SITAR for
- System-Level Testing (SLT) testing lab
- Thick film lab
3. GAETEC, Hyderabad
Scope of activities in UHP scope
- The gas distribution system for hazardous gases (Carbon tetrafluoride, Hydrogen, Helium, Oxygen, Argon, Boron Trichloride, Chlorine, Silane, Ammonia, Nitrogen)
Major Customers
Sl.No. | Project Name |
1 | Semi-conductor Laboratory-Chandigarh |
2 | Air Liquide Singapore Private Limited- Singapore |
3 | Bharat Electronics Limited-Bengaluru |
4 | Gallium Arsenide Enabling Technology Centre-Hyderabad |
5 | Oxford Instruments-Kolkata |
6 | Applied Materials India Private Limited-Mumbai |
7 | SAMCO- Egypt |
8 | NVIDIA Graphics Pvt Ltd-Bengaluru |